In our recent research, innovative applications of Carbon Microelectromechanical Systems (C-MEMS) technology in the development of micro-supercapacitors, micro-sensors, and aptasensors for cancer biomarkers were demonstrated. By integrating nanomaterials such as carbon nanotubes and graphene, the electrochemical performance of devices was enhanced, providing efficient solutions for micro-power applications, early cancer diagnosis, and monitoring. Notably, these studies successfully improved the sensitivity and selectivity of sensors by optimizing the microelectrode structures and material integration, showcasing the significant potential of C-MEMS technology in advancing the development of miniaturized power sources and highly sensitive detection platforms.
In our research, we demonstrated a high-energy aqueous on-chip lithium-ion capacitor (LIC) developed with a three-dimensional carbon microelectrode array. By integrating the characteristics of battery-type and capacitor-type electrodes, this LIC achieved a notable increase in energy density within a confined space. The manufacturing method, which used carbon microelectromechanical systems (C-MEMS) technology and oxygen plasma treatment, not only enhanced the performance of the capacitor-type electrodes but also successfully integrated LiFePO4 (LFP) as the battery-type cathode via electrophoretic deposition (EPD) technique. This resulted in an on-chip LIC with an area energy density five times higher than that of symmetric carbon microelectrode electrochemical capacitors. This research provides new design insights for the development of miniaturized energy storage components and opens up new possibilities for high-performance integrated energy systems in microelectronic devices
